Type of Document	Dissertation
Author	Vijay, Dilip P
URN	etd-06062008-162341
Title	Reliability and processing of ferroelectric thin film capacitors with emphasis on fatigue and etching
Degree	PhD
Department	Materials Engineering Science
Advisory Committee	Advisor Name Title No Advisors Found
Keywords	ferroelectrics thin films reactive ion etching lead zirconate titanate strontium bismuth tantalum oxide laser ablation
Date of Defense	1995-00-00
Availability	restricted
Abstract
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