Title page for ETD etd-06062008-162341

Type of Document Dissertation
Author Vijay, Dilip P
URN etd-06062008-162341
Title Reliability and processing of ferroelectric thin film capacitors with emphasis on fatigue and etching
Degree PhD
Department Materials Engineering Science
Advisory Committee
Advisor Name Title
No Advisors Found
  • ferroelectrics
  • thin films
  • reactive ion etching
  • lead zirconate titanate
  • strontium bismuth tantalum oxide
  • laser ablation
Date of Defense 1995-00-00
Availability restricted
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[VT] LD5655.V856_1995.V385.pdf 16.70 Mb 01:17:18 00:39:45 00:34:47 00:17:23 00:01:29
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