Type of Document	Dissertation
Author	Chiu, Chienchia
URN	etd-06192006-125755
Title	Chemical vapor deposition of gbs-SiC thin films on Si(100) in a hot wall reactor
Degree	PhD
Department	Materials Engineering Science
Advisory Committee	Advisor Name Title Desu, Seshu B. Committee Chair Cox, David F. Committee Member Gordon, Ronald S. Committee Member Lu, Guo-Quan Committee Member Reynolds, William T. Jr. Committee Member
Keywords	Silicon-carbide thin films.
Date of Defense	1994-01-12
Availability	restricted
Abstract see document
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