Title page for ETD etd-06192006-125755


Type of Document Dissertation
Author Chiu, Chienchia
URN etd-06192006-125755
Title Chemical vapor deposition of gbs-SiC thin films on Si(100) in a hot wall reactor
Degree PhD
Department Materials Engineering Science
Advisory Committee
Advisor Name Title
Desu, Seshu B. Committee Chair
Cox, David F. Committee Member
Gordon, Ronald S. Committee Member
Lu, Guo-Quan Committee Member
Reynolds, William T. Jr. Committee Member
Keywords
  • Silicon-carbide thin films.
Date of Defense 1994-01-12
Availability restricted
Abstract
see document
Files
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[VT] LD5655.V856_1994.C558.pdf 26.12 Mb 02:00:55 01:02:11 00:54:25 00:27:12 00:02:19
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