Title page for ETD etd-06282011-131050

Type of Document

Master's Thesis

Author

Hand, Davis Kyle

URN

etd-06282011-131050

Title

A Manufacturing Process for Single Micron Resolution Optical Gratings used in X-ray Computed Tomography

Degree

Master of Science

Department

Electrical and Computer Engineering

Advisory Committee

Advisor Name	Title
Meehan, Kathleen	Committee Chair
Orlowski, Marius	Committee Member
Wyatt, Christopher L.	Committee Member

Keywords

Computed Tomography
Photolithography
Electroplating
DRIE

Date of Defense

2011-01-18

Availability

unrestricted

Abstract

X-ray Computed Tomography (CT) is a process that produces three-dimensional
x-ray images, allowing for better diagnosis and analysis of complex internal medical
conditions. New advances in the optical techniques used in this process promise to
produce better results while reducing patient risk. One of these developments calls for
precise optical gratings that can be expensive and difficult to manufacture. This paper
presents a simple process developed specifically for the production of these gratings
using cost effective techniques. The process uses well understood semiconductor
fabrication steps including oxidation, deep reactive ion etching and electroplating. While
not entirely successful, the process presented within provides a proof of concept for
development of the gratings and discusses improvements that could be made to allow for
success.

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