Title page for ETD etd-07112009-040501


Type of Document Master's Thesis
Author Zou, Shubing
URN etd-07112009-040501
Title Deposition and characterization of HfO{u2082} thin films
Degree Master of Science
Department Materials Science and Engineering
Advisory Committee
Advisor Name Title
No Advisors Found
Keywords
  • Thin films.
Date of Defense 1994-00-00
Availability restricted
Abstract
Files
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[VT] LD5655.V855_1994.Z68.pdf 69.31 Mb 05:20:53 02:45:01 02:24:24 01:12:12 00:06:09
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