Type of Document	Master's Thesis
Author	Zou, Shubing
URN	etd-07112009-040501
Title	Deposition and characterization of HfO{u2082} thin films
Degree	Master of Science
Department	Materials Science and Engineering
Advisory Committee	Advisor Name Title No Advisors Found
Keywords	Thin films.
Date of Defense	1994-00-00
Availability	restricted
Abstract
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